Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, has announced that advanced ArF immersion lithography light source “GT66A” is now fully up and running at semiconductor manufacturers around the world. In recent years, the number of digital devices and cloud facilities has increased rapidly all over the world, and the demand for semiconductors used for such devices and facilities has also i...