Gigaphoton Begins Mass Production and Shipment of the ArFi GT66A Light Source Compatible With Cutting-Edge Miniaturization Technologies

GIGAPHOTON Inc. (Head office: Oyama, Tochigi; President & CEO: Katsumi Uranaka), a manufacturer of light sources for semiconductor lithography, has announced the start of mass production and shipment of the ArF immersion “GT66A” light source using new technologies for state-of-the-art semiconductor lithography manufacturing. Leading-edge device manufacturing has now begun with the process development of 3 nm nodes for logic devices and mass production of 1 Znm DRAM. For these ultra-fine d...